Active Vibration Isolation Design for a Photolithographic Stepper

TitleActive Vibration Isolation Design for a Photolithographic Stepper
Publication TypeConference Papers
Year of Publication1998
AuthorsSubrahmanyan P.K., Williams M.E., Trumper D.L.
Secondary Title6th International Symposium on Magnetic Bearings
Date Published08/1998
Conference LocationCambridge, MA