Biblio
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Filters: Author is Heilmann, R.K. [Clear All Filters]
Optimization and temperature mapping of an ultra-high thermal stability environmental enclosure. Precision Engineering: Journal of the International Societies for Precision Engineering. 34(1)
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2010. Sub-millidegree-stability Air Thermal Control for a Large-volume Lithography Enclosure. ASPE Annual Meeting.
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2006.