Control of a 2 DOF Long-range and 6 DOF Short-range Stages for Nanometer Positioning

TitleControl of a 2 DOF Long-range and 6 DOF Short-range Stages for Nanometer Positioning
Publication TypeConference Papers
Year of Publication2006
AuthorsBuice E.S., Yang H., Smith S.T., Hocken R.J., Otten D., Trumper D.L.
Secondary TitleASPE Annual Meeting
Date Published10/2006
Conference LocationMonterey, CA