Design Evaluation of a Single-Axis Precision Controlled Positioning Stage

TitleDesign Evaluation of a Single-Axis Precision Controlled Positioning Stage
Publication TypeJournal Articles
Year of Publication2009
AuthorsBuice E.S., Otten D., Yang R.H., Smith S.T., Hocken R.H., Trumper D.L.
Secondary TitlePrecision Engineering: Journal of the International Societies for Precision Engineering
Volume33
Issue4
Pagination418–424
Date Published10/2009