The Design, Fabrication, and Testing of a Micromechanical Silicon Oscillating Accelerometer

TitleThe Design, Fabrication, and Testing of a Micromechanical Silicon Oscillating Accelerometer
Publication TypeConference Papers
Year of Publication1998
AuthorsGibbons K.A., Borenstein J.T., Nokes D.S., Weinberg M.S., Trumper D.L.
Secondary TitleAIAA Conference on Guidance and Control
Date Published08/1998
Conference LocationBoston, MA