Electromagnetic Design of a Low-Fringing-Field Magnetic Bearing Stage for Electron Beam Lithography

TitleElectromagnetic Design of a Low-Fringing-Field Magnetic Bearing Stage for Electron Beam Lithography
Publication TypeJournal Articles
Year of Publication2003
AuthorsKonkola P, Trumper D.L.
Secondary TitleJSME International Journal, Special Issue on Magnetic Bearings, Series C
Volume46
Issue2
Section370
Date Published06/2003