High Accuracy Atomic Force Microscope for Dimensional Metrology

TitleHigh Accuracy Atomic Force Microscope for Dimensional Metrology
Publication TypeConference Papers
Year of Publication2008
AuthorsLjubicic D.M., Trumper D.L., Hocken R.J., Overcash J.L.
Secondary Title23rd Annual Meeting of the American Society for Precision Engineering
Date Published10/2008
Conference LocationPortland, OR