High-Accuracy Atomic Force Microscope for Dimensional Metrology

TitleHigh-Accuracy Atomic Force Microscope for Dimensional Metrology
Publication TypeConference Papers
Year of Publication2009
AuthorsAmin-Shahidi D., Ljubicic D.M., Hocken R.J., Trumper D.L.
Secondary Title24th Annual Meeting of the American Society for Precision Engineering
Date Published10/2009
Conference LocationMonterey, CA