High-Accuracy Atomic Force Microscope Probe and Measuring Machine

TitleHigh-Accuracy Atomic Force Microscope Probe and Measuring Machine
Publication TypeConference Papers
Year of Publication2010
AuthorsAmin-Shahidi D., Ljubicic D.M., Overcash J.L., Hocken R.J., Trumper D.L.
Secondary Title25th Annual Meeting of the American Society for Precision Engineering
Date Published10/2010
Conference LocationAtlanta, GA