High-scan Rate Positioner for Scanned Probe Microscopy

TitleHigh-scan Rate Positioner for Scanned Probe Microscopy
Publication TypeConference Papers
Year of Publication2008
AuthorsMacKenzie R.I., Gawlik A., Trumper D.L.
Secondary Title23rd Annual Meeting of the American Society for Precision Engineering
Date Published10/2008
Conference LocationPortland, OR