Title | High-scan rate positioner for scanned probe microscopy |
Publication Type | Patents |
Year of Publication | 2013 |
Authors | Trumper D.L., MacKenzie R.I. |
Number | 8,358,039 |
Date Published | 01/2013 |
Country | U.S. |
Title | High-scan rate positioner for scanned probe microscopy |
Publication Type | Patents |
Year of Publication | 2013 |
Authors | Trumper D.L., MacKenzie R.I. |
Number | 8,358,039 |
Date Published | 01/2013 |
Country | U.S. |