Magnetic/Fluid-Bearing Stage for Atomic-Scale Motion Control

TitleMagnetic/Fluid-Bearing Stage for Atomic-Scale Motion Control
Publication TypeConference Papers
Year of Publication1994
AuthorsTrumper D.L., Holmes M., Behrozjou R., Batchelder D.
Secondary TitleASPE Spring Topical Meeting
Date Published04/1994
Conference LocationTucson, AZ