Title | Magnetic/Fluid-Bearing Stage for Atomic-Scale Motion Control |
Publication Type | Conference Papers |
Year of Publication | 1994 |
Authors | Trumper D.L., Holmes M., Behrozjou R., Batchelder D. |
Secondary Title | ASPE Spring Topical Meeting |
Date Published | 04/1994 |
Conference Location | Tucson, AZ |