Multi-degree-of-freedom Ultra-precision Motion Control Platform for Measurement of Nano-structures: A Course/fine Approach

TitleMulti-degree-of-freedom Ultra-precision Motion Control Platform for Measurement of Nano-structures: A Course/fine Approach
Publication TypeConference Papers
Year of Publication2004
AuthorsYang H., Buice E.S., Peruru H., Smith S.T., Hocken R.J., Smith R.M., Trumper D.L., Otten D.
Secondary TitleASPE Annual Meeting
Date Published10/2004
Conference LocationOrlando, FL