Title | Multi-degree-of-freedom Ultra-precision Motion Control Platform for Measurement of Nano-structures: A Course/fine Approach |
Publication Type | Conference Papers |
Year of Publication | 2004 |
Authors | Yang H., Buice E.S., Peruru H., Smith S.T., Hocken R.J., Smith R.M., Trumper D.L., Otten D. |
Secondary Title | ASPE Annual Meeting |
Date Published | 10/2004 |
Conference Location | Orlando, FL |