Spring Dominated Design of a High Load Capacity Electromagnetically Driven X-Y-Theta Stage

TitleSpring Dominated Design of a High Load Capacity Electromagnetically Driven X-Y-Theta Stage
Publication TypeConference Papers
Year of Publication1995
AuthorsChen K.S., Montero A., Trumper D.L., Smith S.T., Williams M.E.
Secondary TitleASPE Annual Meeting
Date Published10/1995