Super-Hybrid Magnetic Suspensions for Interferometric Scanners

TitleSuper-Hybrid Magnetic Suspensions for Interferometric Scanners
Publication TypeJournal Articles
Year of Publication1997
AuthorsNohavec D.R., Trumper D.L.
Secondary TitleJSME International Journal, Series C.
Volume40
IssueSpecial Issue on Magnetic Bearings
Section570
Date Published12/1997