Publication Type:
Conference Papers
Six-Degree-of-Freedom Planar Positioner with Linear Magnetic Bearings/Motors
Magnetically-Suspended Stage for Accurate Positioning of Large Samples in Scanned Probe Microscopy
Active Vibration Isolation Design for a Photolithographic Stepper
The Design, Fabrication, and Testing of a Micromechanical Silicon Oscillating Accelerometer
A Rotary Arm Based Turning Machine for Opthalmic Lenses
A High-Bandwidth, High-Precision, Two-Axis Steering Mirror with Moving Iron Actuator
Five Degree of Freedom Control of an Ultra-Precision Magnetically-Suspended Linear Bearing
Nonlinear Compensation Techniques for Magnetic Suspension Systems
Experimental Results in Nonlinear Compensation of a One-Degree-of-Freedom Magnetic Suspension
Nanometer Motion Control via Magnetic Suspension
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