Publication Type:
Conference Papers
Multi-degree-of-freedom Ultra-precision Motion Control Platform for Measurement of Nano-structures: A Course/fine Approach
An Ultra-Fast Tool Servo for Diamond Turning of Contoured Surfaces
Atomic Force Microscope for Accurate Dimensional Metrology
A Long Stroke Fast Tool Servo with Integral Balance Mass
System Dynamics and Control System for High Bandwidth Rotary Actuator and Fast Tool Servo
Rubber Bearings and Their Applicability in Precision Machines
Early Testing of a Coarse/Fine Precision Motion Control System
Low Stray Field Maglev Stages for Vacuum Applications
Fast Tool Servos: Advances in Precision, Acceleration, and Bandwidth
Sub-millidegree-stability Air Thermal Control for a Large-volume Lithography Enclosure
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