Publication Type:
Conference Papers
Self-Calibration for Air-Bearing Rotary Encoders
Control of a 2 DOF Long-range and 6 DOF Short-range Stages for Nanometer Positioning
3D Pattern Generation by Diamond Turning using a Novel Fast Tool Servo Design
A High-Bandwidth, High-Precision, Two-Axis Steering Mirror
System Design Based on Dynamic Error Budgeting
High Accuracy Atomic Force Microscope for Dimensional Metrology
Pushing the Thermal Limit in Linear Motors
Precision Control of Planar Magnetic Levitator
Eigenstructure Assignment Techniques for Precision Motion Control
Eigenvector Assignemtn
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