Publication Type:
Conference Papers
Tuning Controllers with Multiple Adaptive Feed-Forward Cancellation Resonators
Magnetic Bearing Stages for Electron Beam Lithography
A Laser Speckle Sensor for Compound Rotary-Linear Motion Metrology
Electromagnetically-Driven Ultrafast Tool Servo
High-Bandwidth Short-Stroke Rotary Fast Tool Servo
Materials for Efficient High-Flux Magnetic-Bearing Actuators
Analysis of Achievable Disturbance Attenuation in a Precision Magnetically-Suspended Motion Control System
Magnetic/Fluid-Bearing Stage for Atomic-Scale Motion Control
Atomic-Scale Motion Control via Hybrid Fluid/Magnetic Bearings
Precision Magnetic Bearing Six Degree of Freedom Stage
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