Publication Type:
Journal Articles
Magnetic/Fluid Bearing Stage for Atomic-Scale Motion Control
Modeling and Control of a Six Degree of Freedom Magnetic/Fluidic Motion Control Stage
Linearizing Control of Magnetic Suspension Systems
Linear Motor Levitated Stage for Photolithography
Super-Hybrid Magnetic Suspensions for Interferometric Scanners
Design of a Rotary Fast Tool Servo for Ophthalmic Lens Fabrication
The Long-Range Scanning Stage: a Novel Platform for Scanned-Probe Microscopy
Dynamics and Control of the UNCC/MIT Subatomic Measuring Machine
Vibration Control of Flexible Structures Using Sensor Averaging and Actuator Averaging Methods
Design and Control for an Electromagnetically Driven X-Y-Theta Stage
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