Design and Sensorless Control of a Piezoelectric Reticle Assist Device for Counteracting Inertial Loads and Preventing Reticle Slip in Lithography Scanners

Title:
Design and Sensorless Control of a Piezoelectric Reticle Assist Device for Counteracting Inertial Loads and Preventing Reticle Slip in Lithography Scanners
Publication Type:
Year of Publication:
2024
Authors:
Secondary Tiitle:
ASME Journal of Dynamic Systems, Measurement, and Control
Volumne:
1734
Issue:
5
Section:
164
Date Published:
03/2024
Conference Location:
Orlando, FL
Country:
US
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