Biblio
Author: Amin-Shahidi D
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Design and Sensorless Control of a Piezoelectric Reticle Assist Device for Counteracting Inertial Loads and Preventing Reticle Slip in Lithography Scanners
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017
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Design and Control of a Piezoelectric Driven Reticle Assist Device for Prevention of Reticle Slip in Lithography Systems
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017
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Macro-Scale Atomic Force Microscope: an Experimental Platform for Teaching Precision Mechatronics
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017
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High-Accuracy Atomic Force Microscope for Dimensional Metrology
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017
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High-Accuracy Atomic Force Microscope Using a Self-Sensing Probe
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017
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High-Accuracy Atomic Force Microscope Probe and Measuring Machine
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017
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Oscillation-Synchronous Control of a Frequency-Measuring Atomic Force Microscope
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017
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Self-Sensing Contact Detection for Actuated Systems
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017
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Improved Charge Amplifier Using Hybrid Hysteresis Compensation
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017