Biblio
Author: Buice E
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Multi-degree-of-freedom Ultra-precision Motion Control Platform for Measurement of Nano-structures: A Course/fine Approach
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017
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Early Testing of a Coarse/Fine Precision Motion Control System
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017
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Control of a 2 DOF Long-range and 6 DOF Short-range Stages for Nanometer Positioning
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017
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Design Evaluation of a Single-Axis Precision Controlled Positioning Stage
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017