Biblio
Author: Konkola P
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Methods and Apparatus Involving Selectively Tailored Electromagnetic Fields
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017
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Magnetic Bearing Stages for Electron Beam Lithography
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017
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Electromagnetic Design of a Low-Fringing-Field Magnetic Bearing Stage for Electron Beam Lithography
2024ASME Journal of Dynamic Systems, Measurement, and Control1734050017