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Author:
Schattenburg M
Zhao Y
Trumper D L
Heilmann R
Schattenburg M
Sub-millidegree-stability Air Thermal Control for a Large-volume Lithography Enclosure
2024
ASME Journal of Dynamic Systems, Measurement, and Control
1734
050017
Akilian M
Forest C
Slocum A
Trumper D L
Schattenburg M
Thin Optic Constraint
2024
ASME Journal of Dynamic Systems, Measurement, and Control
1734
050017
